JPS51113367U - - Google Patents

Info

Publication number
JPS51113367U
JPS51113367U JP3296775U JP3296775U JPS51113367U JP S51113367 U JPS51113367 U JP S51113367U JP 3296775 U JP3296775 U JP 3296775U JP 3296775 U JP3296775 U JP 3296775U JP S51113367 U JPS51113367 U JP S51113367U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3296775U
Other languages
Japanese (ja)
Other versions
JPS5513430Y2 (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3296775U priority Critical patent/JPS5513430Y2/ja
Publication of JPS51113367U publication Critical patent/JPS51113367U/ja
Application granted granted Critical
Publication of JPS5513430Y2 publication Critical patent/JPS5513430Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP3296775U 1975-03-11 1975-03-11 Expired JPS5513430Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3296775U JPS5513430Y2 (en]) 1975-03-11 1975-03-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3296775U JPS5513430Y2 (en]) 1975-03-11 1975-03-11

Publications (2)

Publication Number Publication Date
JPS51113367U true JPS51113367U (en]) 1976-09-14
JPS5513430Y2 JPS5513430Y2 (en]) 1980-03-26

Family

ID=28145025

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3296775U Expired JPS5513430Y2 (en]) 1975-03-11 1975-03-11

Country Status (1)

Country Link
JP (1) JPS5513430Y2 (en])

Also Published As

Publication number Publication date
JPS5513430Y2 (en]) 1980-03-26

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